Sensor QA status(lot14) Jumpei Kanaya (RIKEN) 14th　Jul , 2010 1.

Presentation on theme: "Sensor QA status(lot14) Jumpei Kanaya (RIKEN) 14th　Jul , 2010 1."— Presentation transcript:

1 Sensor QA status(lot14) Jumpei Kanaya (RIKEN) 14th　Jul , 2010 1

2 Topics QA (lot14) 1枚進んだ。 Class III Lot14 Probed/Sensor : 26/35
Class I : Class II :4 Class III : 1 Yield : 80.8%

3 Topics Probe card(Alice.01) 破損
probe card と contact pad の接触後に操作ミスで Chuck を動かした為　readout-chip 表面と sensor の一部にキズがついてしまった。これによりprobe needle と contact pad の位置がズレたので、 probe card を修理に出した。 7/21(水）に理研に到着予定

4 bias currrent is unstable
lot sensor class Defect Pixels (%) remadk wafer ID sensor ID 4 3 2 1 14 (25/35) 171 0.15 5.51 1.00 0.07 XQ4HYXT 83703 182 1.35 0.32 1.89 1.76 X94G5TT 83705 183 0.10 0.02 0.09 184 0.05 0.13 0.17 1.34 X94G5TT/XQ4HYXT 185 0.04 XF4IVQT 186 0.16 1.83 187 0.00 VF4IVQT 83708 188 0.01 0.11 0.20 189 2.45 0.74 1.88 0.78 190 2.49 2.56 0.85 bias currrent is unstable 191 0.22 1.93 1.33 0.87 195 0.06 0.21 XF4IVQT/XI4IW4T 196 0.57 XI4IW4T 83706 197 0.44 198 199 0.83 200 83710 205

5 14 (26/35) 199 1 0.83 0.02 0.04 XI4IW4T 83706 200 0.00 0.01 83710 201 0.11 0.05 202 0.06 0.10 203 0.13 204 205 172 3 0.20 1.01 JTAG Test Error XQ4HYXT 83703

6 Right_edge_of_conatctpad is broken
lot sensor# chip 4 3 2 1 6 839 Right_edge_of_conatctpad is broken 50 I Analogue below after JTAG test value remains low Can not turn MB card ON 8 61 Low Pre vth Assumed 170 for Test peal off from sensor 862 No Min.Threshold. Gaurdring short 864 Mask Test Error 9 77 Cannot reset MB card 882 Cannot turn on MB card 884 91 No Min.Threshold Destructive_inspection. Mask Test Error. Destructive_inspection. 11 116 Cannot ajust noisy pixel at hitmap D.P:25.52% 8121 High I Anaiogue 13 151 D.P:6.35% Mean.Thr:74.41mV. D.P:3.7% D.P:1.84% 154 D.P:6.92% No FO Threshold 155 D.P:3.42% D.P:12.08% D.P:1.39% D.P:4.8% 158 169 D.P:1.65% D.P:23.36% 14 172 JTAG Error

7 Class RIKEN Hayashi VTT CERN Assembly total 1 35 20 2 77 134 11 9 3 4 30 ※Ladder#19 まで組立完了として 2010/7/6 Class RIKEN Hayashi VTT CERN Assembly total 1 35 20 2 77 134 11 9 3 21 4 31 ※Ladder#19 まで組立完了として 2010/7/13

8 Hit Map of VTT Ladder in Source Test
Class III Ladder (2010/7) chip 4 chip 2 chip 3 chip 1 I I III I JTAG Test Error 0.10% 0.20% 1.01%